-40%
Wafer Foundry for sale SiC GaN Si R&D Silicon Valley Wafer Fabrication Incubator
$ 18480
- Description
- Size Guide
Description
Silicon Incubator, (www.siliconincubator.com) available wafer fab for lease, 150 mm, 100 mm Wafer Foundry R&D, production shared facility in Silicon Valley. capable to process GaN, SiC, Si, Ga2O3 , MEMS, POWER MOSFET, IGBT, SBD, 100mm and 150 mm wafer fab facility available for lease, R&D and production shared facility in Silicon Valley, 4 inch wafers, 6 inch wafers, Diffusion, Oxidation, Ion Implant, Stepper photolithography, LPCVD Silicon Nitride, LTO, polysilicon, POCl3, sputtering, electron beam, vacuum depositions, electroplating.LIST OF MAIN equipment currently installed at Silicon Incubator:
1ea. 5X STEPPER, CANON 2500-I2, set-up for 150mm; Capable200mm.
2ea. 4 STACK FURNACE BANKS, THERMCO diffusion furnaces set-up for 150mm, Capable 200mm
2ea. ION IMPLANTERS VARIAN 300XP
2ea. PLASMA ETCHERS LAM 490
2ea. PLASMA ETCHERS LAM 590
1ea. ALUMINUM SPUTTERING MRC 902 Capable 100mm,150mm, 200mmand 300mm.
1ea. CVC SPUTTERING SYSTEM, 4 CATHODES, 100mm, 150mm
1ea. Plasma Lab, RIE, 100mm, 150mm
1ea. CUSTOM BUILT 4 STACK LPCVD SYSTEM; Capable to run,POCL3, Si3N4, Polysilicon, LTO.
1ea. CHA E-BEAM EVAPORATOR – to be installed as needed.
2ea. LTX-ESI80 Win44, Thin Film Resistors Laser Trim equipment, 100mm and 150mm capable.
2ea. MICROAUTOMATION DICING SAWS
1ea. SEM Hitachi-S520LB Scanning Electron Microscope with specimen chamber goniometric 6-axis stage and Kevex XRF X-ray source & detector
Xea. Miscellaneous spin dryers, spin coaters, solvent sink, wet sink.
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